Effects of oxygen flow rate on microstructure and optical...

Vacuum 2010 Vol. 85; Iss. 2

Effects of oxygen flow rate on microstructure and optical properties of aluminum oxide films deposited by electron beam evaporation technique

Namita Maiti, A. Biswas, R.B. Tokas, D. Bhattacharyya, S.N. Jha, U.P. Deshpande, U.D. Barve, M.S. Bhatia, A.K. Das
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Volume:
85
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.vacuum.2010.05.017
File:
PDF, 925 KB
english, 2010
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