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The AlN based solidly mounted resonators consisted of the all-metal conductive acoustic Bragg reflectors
Da Chen, Yan Xu, Jingjing Wang, Luyin Zhang, Xueshui Wang, Min LiangVolume:
85
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2010.07.001
File:
PDF, 1.28 MB
english, 2010