Optimization of ion energy spread in inductively coupled plasma source designed for focused ion beam applications
P.Y. Nabhiraj, Ranjini Menon, G. Mohan Rao, S. Mohan, R.K. BhandariVolume:
85
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2010.07.008
File:
PDF, 655 KB
english, 2010