Optimization of ion energy spread in inductively coupled...

Optimization of ion energy spread in inductively coupled plasma source designed for focused ion beam applications

P.Y. Nabhiraj, Ranjini Menon, G. Mohan Rao, S. Mohan, R.K. Bhandari
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Volume:
85
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2010.07.008
File:
PDF, 655 KB
english, 2010
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