Atomic oxygen in remote plasma of radio-frequency hollow...

Vacuum 2010 Vol. 85; Iss. 3

Atomic oxygen in remote plasma of radio-frequency hollow cathode discharge source: Characterization and efficiency

M. Naddaf, S. Saloum, B. Alkhaled
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Volume:
85
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.vacuum.2010.08.004
File:
PDF, 1.20 MB
english, 2010
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