Microstructure and property evolution of Cr-DLC films with different Cr content deposited by a hybrid beam technique
Wei Dai, Peiling Ke, Aiying WangVolume:
85
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2010.11.013
File:
PDF, 1.23 MB
english, 2011