Influence of substrate rotation speed on the nanostructure...

Vacuum 2011 Vol. 85; Iss. 7

Influence of substrate rotation speed on the nanostructure of sculptured Cu thin films

Hadi Savaloni, Ferydon Babaei, S. Song, F. Placido
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Volume:
85
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2010.11.017
File:
PDF, 936 KB
english, 2011
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