Analysis of line-edge roughness due to the stick/slip...

Analysis of line-edge roughness due to the stick/slip motion of a contact-mode scanning probe in plasmonic lithography

Park, Changhoon, Jang, Jinhee, Hahn, Jae Won
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Volume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.13.4.043020
Date:
December, 2014
File:
PDF, 1.30 MB
english, 2014
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