Investigation of optical and compositional properties of...

Vacuum 2011 Vol. 85; Iss. 11

Investigation of optical and compositional properties of thin SiNx:H films with an enhanced growth rate by high frequency PECVD method

Min-Jung Lee, Joyti Prakash Kar, Tae Il Lee, Dongwon Lee, Dae-Kyu Choi, Joong-Hwee Cho, Jae-Min Myoung
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Volume:
85
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2011.03.012
File:
PDF, 823 KB
english, 2011
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