Experimental verification of model for prediction of coating composition deposited by sputtering using mosaic target in nitrogen
Kulwant Singh, A.C. Bidaye, A.K. SuriVolume:
86
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2011.04.013
File:
PDF, 340 KB
english, 2011