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Fabrication of uniform large-area polymer “woodpile” photonic crystals structures with nanometer-scale features
Dutta, NeilanjanVolume:
9
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3373515
Date:
April, 2010
File:
PDF, 324 KB
english, 2010