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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Microfluidics and BioMEMS - Microfabricated artificial-muscle-based microvalve array
He, KeQin, Peteu, Serban F., Madou, Marc J., Mastrangelo, Carlos H., Becker, HolgerVolume:
4560
Year:
2001
Language:
english
DOI:
10.1117/12.443042
File:
PDF, 943 KB
english, 2001