Rapid Low Temperature Diode Fabrication on P-Type...

Solid State Phenomena 1999 Vol. 69-70

Rapid Low Temperature Diode Fabrication on P-Type Czochralski Silicon on the Base of Simple Hydrogen Enhanced Thermal Donor Formation Processes

Job, Reinhart, Weima, J.A., Grabosch, G., Borchert, D., Fahrner, Wolfgang R., Raiko, V., Ulyashin, Alexander G.
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Volume:
69-70
Year:
1999
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.69-70.551
File:
PDF, 603 KB
1999
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