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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Surface morphology and subsurface damaged layer of various glasses machined by 193-nm ArF excimer laser
Liao, Yunn-shiuan, Chen, Ying-Tung, Chao, Choung-Lii, Liu, Yih-Ming, Maher, Mary-Ann, Stewart, Harold D.Volume:
5715
Year:
2005
Language:
english
DOI:
10.1117/12.592034
File:
PDF, 2.60 MB
english, 2005