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SPIE Proceedings [SPIE Optics and Measurement Conference 2014 - Liberec, Czech Republic (Tuesday 7 October 2014)] Optics and Measurement Conference 2014 - Local topography of optoelectronic substrates prepared by dry plasma etching process
Kovačičinová, Jana, Vít, Tomáš, Dallaeva, Dinara, Ramazanov, Shikhgasan, Prokopyeva, Elena, Tománek, Pavel, Grmela, LubomírVolume:
9442
Year:
2015
Language:
english
DOI:
10.1117/12.2176367
File:
PDF, 813 KB
english, 2015