Photo-Acoustic Displacement Measurements for Characterization of Subsurface Defects in Silicon
Sumie, Shingo, Takamatsu, Hiroyuki, Nishino, TaneoVolume:
115-116
Year:
1994
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.115-116.85
File:
PDF, 1.13 MB
english, 1994