SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - Frequency-domain simulations of optical antenna structures
Hafner, Christian, Cui, Xudong, Bertolace, Andre, Vahldieck, Rüdiger, Bosse, Harald, Bodermann, Bernd, Silver, Richard M.Volume:
6617
Year:
2007
Language:
english
DOI:
10.1117/12.725876
File:
PDF, 460 KB
english, 2007