Combining micro- and nano-texture to fabricate an...

Combining micro- and nano-texture to fabricate an antireflective layer

Malekmohammad, Mohammad
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.1.013011
Date:
March, 2012
File:
PDF, 1.83 MB
english, 2012
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