Generalized mask error enhancement factor theory

Journal of Micro/Nanolithography MEMS and MOEMS 2005 / 04 Vol. 4; Iss. 2

Generalized mask error enhancement factor theory

Granik, Yuri
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Volume:
4
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.1898066
Date:
April, 2005
File:
PDF, 239 KB
english, 2005
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