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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Miniaturized Systems with Micro-Optics and MEMS - Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope
Hofmann, Ulrich, Muehlmann, Sascha, Witt, Martin, Doerschel, Klaus, Schuetz, Rijk, Wagner, Bernd, Motamedi, M. Edward, Goering, RolfVolume:
3878
Year:
1999
Language:
english
DOI:
10.1117/12.361269
File:
PDF, 1.27 MB
english, 1999