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SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2014 - Zvenigorod, Russian Federation (Monday 6 October 2014)] International Conference on Micro- and Nano-Electronics 2014 - Monte Carlo simulation of boron doping profile of fin and trench structures by plasma immersion ion implantation
Orlikovsky, Alexander A., Shahsenov, Izat S., Miakonkikh, Andrey V., Rudenko, Kostantin V.Volume:
9440
Year:
2014
Language:
english
DOI:
10.1117/12.2181068
File:
PDF, 240 KB
english, 2014