Linearized inversion of scatterometric data to obtain...

Linearized inversion of scatterometric data to obtain surface profile information

Dre`ge, Emmanuel M.
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Volume:
41
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.1416850
Date:
January, 2002
File:
PDF, 840 KB
english, 2002
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