SPIE Proceedings [SPIE SPIE Astronomical Telescopes + Instrumentation - Montréal, Quebec, Canada (Sunday 22 June 2014)] Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation - High performance Si immersion gratings patterned with electron beam lithography
Navarro, Ramón, Cunningham, Colin R., Barto, Allison A., Gully-Santiago, Michael A., Jaffe, Daniel T., Brooks, Cynthia B., Wilson, Daniel W., Muller, Richard E.Volume:
9151
Year:
2014
Language:
english
DOI:
10.1117/12.2056912
File:
PDF, 709 KB
english, 2014