Study of TiW/Au Thin Films Metallization Stack for High Temperature and Harsh Environment Devices on 6H Silicon Carbide
Baeri, A., Raineri, Vito, Roccaforte, Fabrizio, La Via, Francesco, Zanetti, E.Volume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.873
File:
PDF, 177 KB
english, 2004