Tradeoffs in micro-opto-electro-mechanical system materials

Optical Engineering 1997 / 05 Vol. 36; Iss. 5

Tradeoffs in micro-opto-electro-mechanical system materials

Cabuz, Cleopatra
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Volume:
36
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.601330
Date:
May, 1997
File:
PDF, 257 KB
english, 1997
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