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Deep lateral anhydrous HF/methanol etching for MEMS release processes
Erdamar, MeltemVolume:
7
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2959177
Date:
July, 2008
File:
PDF, 230 KB
english, 2008