Atmospheric pressure plasma enabled polishing of single crystal sapphire
Bastawros, Ashraf F., Chandra, Abhijit, Poosarla, Pavan A.Volume:
64
Year:
2015
Language:
english
Journal:
CIRP Annals - Manufacturing Technology
DOI:
10.1016/j.cirp.2015.04.037
File:
PDF, 1.52 MB
english, 2015