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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Invar electrodeposition for MEMS application
Hirano, Toshiki, Fan, Long-Sheng, Pang, Stella W., Chang, Shih-ChiaVolume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251214
File:
PDF, 558 KB
english, 1996