SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachine Technology for Diffractive and Holographic Optics - Miniaturized achromatic hybrid objective containing LIGA-made microlenses
Ilie, Mihaela, Ursu, Danut, Lee, Sing H., Cox, J. AllenVolume:
3879
Year:
1999
Language:
english
DOI:
10.1117/12.360527
File:
PDF, 2.38 MB
english, 1999