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Investigation of Electrostatic Cantilever-Type Micromechanical Actuator
Dauksevicius, Rolanas, Ostaševičius, Vytautas, Tamulevičius, Sigitas, Bubulis, Algimantas, Gaidys, RimvydasVolume:
113
Year:
2006
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.113.179
File:
PDF, 3.36 MB
english, 2006