Cryogenic testing of a unimorph-type deformable mirror and theoretical material optimization
Goy, Matthias, Reinlein, Claudia, Kinast, Jan, Lange, NicolasVolume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.13.1.011107
Date:
November, 2013
File:
PDF, 2.36 MB
english, 2013