Cryogenic testing of a unimorph-type deformable mirror and...

Cryogenic testing of a unimorph-type deformable mirror and theoretical material optimization

Goy, Matthias, Reinlein, Claudia, Kinast, Jan, Lange, Nicolas
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Volume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.13.1.011107
Date:
November, 2013
File:
PDF, 2.36 MB
english, 2013
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