![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE International Symposium on Optoelectonics and Microelectronics - Nanjing, China (Wednesday 7 November 2001)] Semiconductor Optoelectronic Device Manufacturing and Applications - Pulsed laser deposition of crystalline carbon nitride thin films at high substrate temperature
Fu, Guangsheng, Yu, Wei, Wang, Shu-Fang, Zhang, Lianshui, Li, Xiao-Wei, Chen, David, Chen, Ray T., Wang, Guo-Yu, Zhu, Chang-ChangVolume:
4602
Year:
2001
Language:
english
DOI:
10.1117/12.445729
File:
PDF, 137 KB
english, 2001