SPIE Proceedings [SPIE Advances in Resist Technology and...

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SPIE Proceedings [SPIE Advances in Resist Technology and Processing VIII - San Jose, United States (Monday 4 March 1991)] Advances in Resist Technology and Processing VIII - Structural effects of DNQ-PAC backbone on resist lithographic properties

Uenishi, Kazuya, Kawabe, Yasumasa, Kokubo, Tadayoshi, Slater, Sydney G., Blakeney, Andrew J., Ito, Hiroshi
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Volume:
1466
Year:
1991
Language:
english
DOI:
10.1117/12.46362
File:
PDF, 593 KB
english, 1991
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