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Extremely Uniform, High Quality SiC Epitaxy on 100-mm Substrates
Sumakeris, Joseph J., Henning, Jason, O'Loughlin, Michael J., Sriram, Saptharishi, Balakrishna, VijayVolume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.99
File:
PDF, 351 KB
english, 2009