![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - High precision laser forming for microactuation
Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Folkersma, Ger K. G. P., Römer, G.R.B. E., Brouwer, D. M., Huis in 't Veld, A. J.Volume:
8967
Year:
2014
Language:
english
DOI:
10.1117/12.2037675
File:
PDF, 2.17 MB
english, 2014