Ion Beam Induced Excess Vacancies in Si and SiGe and...

Solid State Phenomena 2004 Vol. 95-96

Ion Beam Induced Excess Vacancies in Si and SiGe and Related Cu Gettering

Kögler, R., Peeva, A., Kuznetsov, An., Christensen, J.S., Svensson, Bengt G., Skorupa, Wolfgang
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Volume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.587
File:
PDF, 654 KB
english, 2004
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