Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers
Reshanov, Sergey A., Klettke, O., Pensl, Gerhard, Choyke, W.J.Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.433-436.459
File:
PDF, 445 KB
english, 2003