Line edge and width roughness smoothing by plasma treatment

Journal of Micro/Nanolithography MEMS and MOEMS 2014 / 05 Vol. 13; Iss. 2

Line edge and width roughness smoothing by plasma treatment

De Schepper, Peter, Hansen, Terje, Altamirano-Sanchez, Efrain, Pret, Alessandro Vaglio, el Otell, Ziad, Boulart, Werner, De Gendt, Stefan
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Volume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.13.2.023006
Date:
May, 2014
File:
PDF, 2.26 MB
english, 2014
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