Polytype and Surface Characterization of Silicon Carbide Thin Films
Schröter, B., Kreuzberg, M., Fissel, Andreas, Pfennighaus, K., Richter, W.Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.355
File:
PDF, 366 KB
1998