[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Crystallization Process of Amorphous Silicon Utilizing A Radio Frequency Thermal Plasma Torch
Ota, Naoki, Haruta, Koji, Shimizu, Hirokazu, Kobayashi, Tomohiro, Shirai, HajimeYear:
2009
Language:
english
DOI:
10.1149/1.3207636
File:
PDF, 2.10 MB
english, 2009