Smooth silicon sidewall etching for waveguide structures...

Journal of Micro/Nanolithography MEMS and MOEMS 2014 / 03 Vol. 13; Iss. 1

Smooth silicon sidewall etching for waveguide structures using a modified Bosch process

Gao, Feng, Ylinen, Sami, Kainlauri, Markku, Kapulainen, Markku
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Volume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.13.1.013010
Date:
March, 2014
File:
PDF, 1.50 MB
english, 2014
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