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SPIE Proceedings [SPIE 2000 International Conference on Application of Photonic Technology (ICAPT 2000) - Quebec City, Canada (Monday 12 June 2000)] Applications of Photonic Technology 4 - PECVD technology for low-temperature fabrication of silica-on-silicon-based channel waveguides and devices
Wosinski, Lech, Sahu, Jayanta K., Dainese, Matteo, Fernando, Harendra, Lessard, Roger A., Lampropoulos, George A.Volume:
4087
Year:
2000
Language:
english
DOI:
10.1117/12.406444
File:
PDF, 251 KB
english, 2000