Maskless fabrication of nanogap electrodes by using...

Journal of Micro/Nanolithography MEMS and MOEMS 2006 / 01 Vol. 5; Iss. 1

Maskless fabrication of nanogap electrodes by using Ga-focused ion beam etching

Nagase, Takashi
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Volume:
5
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2172614
Date:
January, 2006
File:
PDF, 726 KB
english, 2006
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