SPIE Proceedings [SPIE 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies - Dalian, China (Monday 26 April 2010)] 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - IBF technology for nanomanufacturing technology
Franz, T., Hänsel, T., Yang, Li, Namba, Yoshiharu, Walker, David D., Li, ShengyiVolume:
7655
Year:
2010
Language:
english
DOI:
10.1117/12.883031
File:
PDF, 13.67 MB
english, 2010