Analysis for Replication and Surface Roughness of...

Advanced Materials Research 2008 Vol. 47-50

Analysis for Replication and Surface Roughness of Micro-Feature of Silicon Mold Insert by UV-LIGA Method

Huang, Chiung Fang, Lee, Jeol Long, Shen, Yung Kang, Wu, Chi Wei, Lin, Yi, Hsu, Sung Chih, Wu, Ming Wei, Kao, Chung Yu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
47-50
Year:
2008
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.47-50.443
File:
PDF, 391 KB
english, 2008
Conversion to is in progress
Conversion to is failed