Pyrex/Si-bonded microvalve performance for precision...

Journal of Micro/Nanolithography MEMS and MOEMS 2012 / 03 Vol. 11; Iss. 1

Pyrex/Si-bonded microvalve performance for precision applications in micropropulsion systems

Pramanick, Bidhan
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.1.013008
Date:
March, 2012
File:
PDF, 3.86 MB
english, 2012
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