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SiGe Heterostructures-on-Insulator Produced by Ge+-Ion Implantation and Subsequent Hydrogen Transfer
Tyschenko, I.E., Cherkov, A.G., Voelskow, M., Popov, V.P.Volume:
131-133
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.131-133.143
File:
PDF, 558 KB
english, 2008