Morphological and Structural Characterization of TiN/ZrN...

Advances in Science and Technology 2006 Vol. 45

Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering

Rizzo, Antonella, Signore, Maria A., Di Luccio, Tiziana, Tagliente, M. Antonella, De Riccardis, Maria Federica
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Volume:
45
Year:
2006
Language:
english
Journal:
Advances in Science and Technology
DOI:
10.4028/www.scientific.net/AST.45.1206
File:
PDF, 2.01 MB
english, 2006
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