SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Measurement based simulation of microscope deviations for evaluation of stitching algorithms for the extension of Fourier-based alignment
Engelke, Florian, Kästner, Markus, Reithmeier, Eduard, Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.Volume:
8789
Year:
2013
Language:
english
DOI:
10.1117/12.2020595
File:
PDF, 2.65 MB
english, 2013