Adsorption of Moisture and Organic Contaminants on Hafnium Oxide, Zirconium Oxide, and Silicon Oxide Gate Dielectrics
Raghu, Prashant, Rana, Niraj, Yim, Chris, Shero, Eric, Shadman, FarhangVolume:
150
Year:
2003
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1605747
File:
PDF, 420 KB
english, 2003