A Long-Term Reliability of Thermal Oxides Grown on n-Type 4H-SiC Wafer
Senzaki, Junji, Goto, M., Kojima, Kazutoshi, Yamabe, Kikuo, Fukuda, KenjiVolume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.1269
File:
PDF, 356 KB
english, 2004